- All sections
- C - Chemistry; metallurgy
- C23C - Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 16/503 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes characterised by the method of coating using electric discharges using dc or ac discharges
Patent holdings for IPC class C23C 16/503
Total number of patents in this class: 190
10-year publication summary
|
21
|
13
|
9
|
21
|
8
|
14
|
10
|
9
|
6
|
2
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Applied Materials, Inc. | 16587 |
24 |
| Tokyo Electron Limited | 11599 |
14 |
| Lam Research Corporation | 4775 |
11 |
| AGC Glass Europe | 1049 |
9 |
| Aixtron SE | 288 |
6 |
| Konica Minolta, Inc. | 8349 |
4 |
| Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) | 2865 |
4 |
| Toshiba Mitsubishi-Electric Industrial Systems Corporation | 1583 |
4 |
| Youtec Co., Ltd. | 57 |
4 |
| AGM Container Controls, Inc. | 37 |
3 |
| Canon Anelva Corporation | 676 |
3 |
| Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | 6132 |
3 |
| Hitachi High-Tech Corporation | 4424 |
3 |
| Micron Technology, Inc. | 24960 |
2 |
| Varian Semiconductor Equipment Associates, Inc. | 1282 |
2 |
| Infineon Technologies AG | 8189 |
2 |
| Sumitomo Chemical Company, Limited | 8808 |
2 |
| NGK Insulators, Ltd. | 4589 |
2 |
| Asahi Glass Company, Limited | 2985 |
2 |
| Shimadzu Corporation | 5791 |
2 |
| Other owners | 84 |